ALEXANDRIA, Va., June 17 -- United States Patent no. 12,313,180, issued on May 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Gas flow valve and methods of operating thereof" was invented by Chang Ke (Sunnyvale, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Certain embodiments of the present disclosure relate to a gas flow valve. The gas flow valve includes a housing configured to receive a flow of gas. The gas flow valve further includes a plunger configured to move between a closed position and one or more open positions within the housing. The gas flow valve further includes a position sensor configured to measure a distance associated with a difference in position of the plung...