ALEXANDRIA, Va., June 17 -- United States Patent no. 12,315,718, issued on May 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Forming films with improved film quality" was invented by Bhargav S. Citla (Fremont, Calif.), Srinivas D. Nemani (Saratoga, Calif.), Purvam Modi (Sunnyvale, Calif.) and Ellie Y. Yieh (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes depositing a flowable film on a substrate by providing a first input flow, the first input flow including plasma effluents of a first precursor, removing a portion of the flowable film from a sidewall of a feature defined within the substrate to obtain a remaining portion of the flowable film by providin...