US Patent Issued to Applied Materials on May 27 for "Bayesian decomposition for mismatched performances in semiconductor equipment" (California, Texas Inventors)

ALEXANDRIA, Va., June 17 -- United States Patent no. 12,314,043, issued on May 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Bayesian decomposition for mismatched performances in semiconductor equipment" was invented by Liem Ferryanto (Gilroy, Calif.), Binbin Wang (San Jose, Calif.), Ravi C. Edupuganti (Austin, Texas) and Anshul Ashok Vyas (San Ramon, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Bayesian inference and modeling techniques, along with model decomposition may be used to improve mismatch performances in semiconductor processing devices by identifying sources of intrinsic and extrinsic variations in performance. A network of causal relationships between processes and...