ALEXANDRIA, Va., June 16 -- United States Patent no. 12,308,218, issued on May 20, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Thermal shield for processing chamber" was invented by Youngki Chang (Santa Clara, Calif.), Muhannad Mustafa (Milpitas, Calif.), Kartik Shah (Saratoga, Calif.), Dhritiman Subha Kashyap (Bangalore, India) and Dhivanraj Subramanian (Tamil Nadu, India).
According to the abstract* released by the U.S. Patent & Trademark Office: "Processing chambers, substrate supports and thermal shields are described. A thermal shield comprises a disc-shaped body having a thickness, an outer diameter with a first edge and a second edge at opposite ends of a diameter of the disc-shaped body, a front surface and a ba...