US Patent Issued to Applied Materials on May 20 for "Dithering or dynamic offsets for improved uniformity" (California Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,305,283, issued on May 20, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Dithering or dynamic offsets for improved uniformity" was invented by Joseph AuBuchon (San Jose, Calif.), Sanjeev Baluja (Campbell, Calif.), Michael Rice (Pleasanton, Calif.), Arkaprava Dan (San Jose, Calif.) and Hanhong Chen (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatus and methods to process one or more substrates are described. A plurality of process stations are arranged in a circular configuration around a rotational axis. A support assembly with a rotatable center base defining a rotational axis, at least two support arms extendin...