US Patent Issued to Applied Materials on May 20 for "Corrosion resistant film on a chamber component and methods of depositing thereof" (California Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,305,275, issued on May 20, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Corrosion resistant film on a chamber component and methods of depositing thereof" was invented by Lisa J. Enman (Sunnyvale, Calif.), Steven D. Marcus (San Jose, Calif.), Mark J. Saly (Santa Clara, Calif.) and Lei Zhou (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a coated chamber component comprising a body having a reduced metal surface such that the reduced metal surface has less metal oxide as compared to an amount of metal oxide on a metal surface that has not been reduced. The metal surface may be reduced by pulsing a reducing ...