US Patent Issued to Applied Materials on May 20 for "Apparatus and methods for fine planar non-uniformity improvement" (California, Arizona Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,305,284, issued on May 20, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Apparatus and methods for fine planar non-uniformity improvement" was invented by Muhannad Mustafa (Milpitas, Calif.), Mario D. Silvetti (Fountain Hills, Ariz.), Mandyam Sriram (San Jose, Calif.) and Sanjeev Baluja (Campbell, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Pedestal heater radiators, pedestal assemblies including the pedestal heater radiators and methods of decreasing deposition non-uniformity are described. The pedestal heater radiator has a first radiator body and a second radiator body with different emissivities. The first radiator body an...