US Patent Issued to Applied Materials on May 13 for "Diagnostic tool to tool matching and full-trace drill-down analysis methods for manufacturing equipment" (South Korean, American Inventors)

ALEXANDRIA, Va., June 12 -- United States Patent no. 12,298,748, issued on May 13, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Diagnostic tool to tool matching and full-trace drill-down analysis methods for manufacturing equipment" was invented by Sejune Cheon (Seoul, South Korea), Jeong Jin Hong (Yongin, South Korea), Mikyung Shim (Seongnam, South Korea), Xiaoqun Zou (Danville, Calif.), Jinkyeong Lee (Seoul, South Korea) and Sang Hong Kim (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes receiving trace sensor data associated with a first manufacturing process of a processing chamber. The method further includes processing the trace sensor data using one...