ALEXANDRIA, Va., March 26 -- United States Patent no. 12,261,019, issued on March 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Voltage pulse time-domain multiplexing" was invented by Kartik Ramaswamy (San Jose, Calif.), Yang Yang (San Diego) and Yue Guo (Redwood City, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments provided herein generally include apparatus, plasma processing systems and methods for generation of a waveform for plasma processing of a substrate in a processing chamber. One embodiment includes a waveform generator having a voltage source circuitry, a first switch coupled between the voltage source circuitry and a first output node of the waveform genera...