ALEXANDRIA, Va., March 19 -- United States Patent no. 12,251,830, issued on March 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Substrate transfer devices, systems and methods of use thereof" was invented by Alexander Berger (Palo Alto, Calif.) and Jeffrey C. Hudgens (San Francisco).
According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosure describes devices, systems and methods relating to a transfer chamber for an electronic device processing system. For example, a method includes causing a robot arm to pick up a substrate. The robot arm is caused to pick up the substrate by causing a first mover to rotate or to change a first distance to a second mover. Rotation of the first mover o...