ALEXANDRIA, Va., June 4 -- United States Patent no. 12,318,868, issued on June 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Texturizing a surface without bead blasting" was invented by Gang Peng (Fremont, Calif.), David W. Groechel (Los Altos Hills, Calif.), Jenn C. Chow (San Jose, Calif.), Tuochuan Huang (Saratoga, Calif.) and Han Wang (Palo Alto, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system to provide a texture to a surface of a component for use in a semiconductor processing chamber is provided. The system includes an enclosure comprising a processing region, a support disposed in the processing region, a photon light source to generate a stream of photons, an optica...