ALEXANDRIA, Va., June 4 -- United States Patent no. 12,322,602, issued on June 3, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).
"Recessed metal etching methods" was invented by Wangkeun Cho (Mechanicville, N.Y.) and Gene Lee (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments described herein generally relate to electronic devices and electronic device manufacturing. More particularly, some embodiments of the present disclosure provide methods of manufacturing memory devices, for example, dynamic random-access memory cells with buried word-lines. In an embodiment, a method of manufacturing an electronic device is provided. The method includes recessing a metal layer t...