US Patent Issued to APPLIED MATERIALS on June 3 for "Pulsing plasma treatment for film densification" (California Inventors)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,322,573, issued on June 3, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Pulsing plasma treatment for film densification" was invented by Rui Li (San Jose, Calif.), Xiangjin Xie (Fremont, Calif.), Xianmin Tang (San Jose, Calif.) and Anthony Chih-Tung Chan (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatus for forming a barrier layer are provided herein. In some embodiments, a method of forming a barrier layer on a substrate includes treating an exposed layer deposited on a substrate and within a feature of the substrate by pulsing a bias power applied to a substrate support supporting the substrate wh...