US Patent Issued to Applied Materials on June 3 for "Electrostatic chuck with improved temperature control" (Indian, American Inventors)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,322,633, issued on June 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Electrostatic chuck with improved temperature control" was invented by Hanish Kumar Panavalappil Kumarankutty (Bengaluru, India), Sean M. Seutter (San Jose, Calif.), Sudhir R. Gondhalekar (Pleasanton, Calif.), Wendell Glenn Boyd Jr. (Morgan Hill, Calif.), Badri Ramamurthi (Los Gatos, Calif.), Shekhar Athani (Bangalore, India), Anil Kumar Kalal (Bangalore, India) and Jay Dee Pinson II (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the disclosure provide electrostatic chucks for securing substrates during processing. Some embodiments o...