US Patent Issued to Applied Materials on June 3 for "Carrier transport system, vacuum processing apparatus, and method of transportation of a carrier in a vacuum chamber" (German Inventor)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,319,519, issued on June 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Carrier transport system, vacuum processing apparatus, and method of transportation of a carrier in a vacuum chamber" was invented by Christian Wolfgang Ehmann (Darmstadt, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A carrier transport system for transporting a carrier within a vacuum chamber is described. The carrier transport system includes a track assembly extending in a transport direction, the track assembly comprising: a first passive magnetic unit provided at a first vertical coordinate and extending in the transport direction, a second passive ma...