US Patent Issued to Applied Materials on June 24 for "Symmetric and irregular shaped plasmas using modular microwave sources" (California Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,340,978, issued on June 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Symmetric and irregular shaped plasmas using modular microwave sources" was invented by Thai Cheng Chua (Cupertino, Calif.), Farzad Houshmand (Mountain View, Calif.), Christian Amormino (San Jose, Calif.) and Philip Allan Kraus (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments include a plasma processing tool that includes a processing chamber, and a plurality of modular microwave sources coupled to the processing chamber. In an embodiment, the plurality of modular microwave sources include an array of applicators that are positioned ove...