ALEXANDRIA, Va., June 25 -- United States Patent no. 12,338,530, issued on June 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Shaped showerhead for edge plasma modulation" was invented by Saketh Pemmasani (Hyderabad, India), Daemian Raj Benjamin Raj (Fremont, Calif.), Xiaopu Li (San Jose, Calif.), Akshay Dhanakshirur (Hubli, India), Mayur Govind Kulkarni (Bangalore, India), Madhu Santosh Kumar Mutyala (Santa Clara, Calif.), Deenesh Padhi (Sunnyvale, Calif.) and Hang Yu (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary semiconductor processing chambers may include a chamber body. The chambers may include a substrate support disposed within the chamber body. The su...