ALEXANDRIA, Va., June 25 -- United States Patent no. 12,340,984, issued on June 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Radio frequency power return path" was invented by Luke Bonecutter (Cedar Park, Texas), David Blahnik (Austin, Texas), Tuan Anh Nguyen (San Jose, Calif.) and Amit Kumar Bansal (Milpitas, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments presented herein are directed to radio frequency (RF) grounding in process chambers. In one embodiment, a dielectric plate is disposed between a chamber body and a lid of a process chamber. The dielectric plate extends laterally into a volume defined by the chamber body and the lid. A substrate support is disposed i...