ALEXANDRIA, Va., June 25 -- United States Patent no. 12,341,048, issued on June 24, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).
"Porous plug for electrostatic chuck gas delivery" was invented by Alexander Sulyman (San Francisco), Xue Yang Chang (San Jose, Calif.), Anwar Husain (Pleasonton, Calif.), Timothy Joseph Franklin (Campbell, Calif.) and Joseph F. Sommers (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Porous plugs for gas delivery in substrate supports and substrate supports and substrate processing chambers incorporating same are provided herein. In some embodiments, a porous plug for use in a substrate support includes: a porous central passageway; and a solid out...