ALEXANDRIA, Va., June 25 -- United States Patent no. 12,337,439, issued on June 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Multiple disk pad conditioner" was invented by Jay Gurusamy (Santa Clara, Calif.), Steven M. Zuniga (Soquel, Calif.), Takashi Fujikawa (Sunnyvale, Calif.) and Jeonghoon Oh (Saratoga, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure provide a multiple disk pad conditioner and methods of using the multiple disk pad conditioner during a chemical mechanical polishing (CMP) process. The multiple disk pad conditioner has a plurality of conditioning heads having conditioning disks affixed thereto. The multiple disk pad condition...