US Patent Issued to APPLIED MATERIALS on June 24 for "Methods of selective oxidation on rapid thermal processing (RTP) chamber with active steam generation" (American, Indian Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,341,032, issued on June 24, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Methods of selective oxidation on rapid thermal processing (RTP) chamber with active steam generation" was invented by Chaitanya Anjaneyalu Prasad (Cupertino, Calif.), Christopher Sean Olsen (Fremont, Calif.), Lara Hawrylchak (Gilroy, Calif.), Erika Gabrielle Hansen (San Jose, Calif.), Daniel C. Glover (Danville, Calif.), Naman Apurva (Patna, India) and Tsung-Han Yang (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of methods of performing a selective oxidation process on non-metal surfaces are provided herein. In some embodiments, a ...