US Patent Issued to Applied Materials on June 24 for "Estimation of chamber component conditions using substrate measurements" (California Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,339,645, issued on June 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Estimation of chamber component conditions using substrate measurements" was invented by Chunlei Zhang (Santa Clara, Calif.), Zhaozhao Zhu (Milpitas, Calif.) and Michael Kutney (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes processing a substrate in a process chamber according to a recipe, wherein the substrate comprises at least one of a film or a feature after the processing. The method further includes generating a profile map of the first substrate. The method further includes processing data from the profile map using a ...