US Patent Issued to Applied Materials on June 17 for "Tunable temperature controlled substrate support assembly" (California Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,385, issued on June 17, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Tunable temperature controlled substrate support assembly" was invented by Vijay D. Parkhe (San Jose, Calif.), Steven E. Babayan (Los Altos, Calif.), Konstantin Makhratchev (Fremont, Calif.), Zhiqiang Guo (Sunnyvale, Calif.), Phillip R. Sommer (Newark, Calif.) and Dan A. Marohl (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Implementations described herein provide a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a heating assembly. The substrate support assembly c...