US Patent Issued to Applied Materials on June 17 for "System and methods for implementing a micro pulsing scheme using dual independent pulsers" (California, Washington Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,304, issued on June 17, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"System and methods for implementing a micro pulsing scheme using dual independent pulsers" was invented by A N M Wasekul Azad (Santa Clara, Calif.), Kartik Ramaswamy (San Jose, Calif.), Yue Guo (Redwood City, Calif.), Nicolas J. Bright (Arlington, Wash.) and Yang Yang (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the disclosure provided herein include an apparatus and method for processing a substrate in a plasma processing system. The apparatus includes a pulse voltage (PV) waveform generator comprising at least one synchronization sign...