US Patent Issued to APPLIED MATERIALS on June 17 for "Substrate support gap pumping to prevent glow discharge and light-up" (American, Indian Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,383, issued on June 17, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Substrate support gap pumping to prevent glow discharge and light-up" was invented by James David Carducci (Sunnyvale, Calif.), Kenneth S. Collins (San Jose, Calif.), Michael R. Rice (Pleasanton, Calif.), Kartik Ramaswamy (San Jose, Calif.), Silverst Antony Rodrigues (Bangalore, India) and Yang Yang (Cupertino, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of substrate supports for use in substrate processing chambers are provided herein. In some embodiments, a substrate support for use in a substrate processing chamber includes: a pedestal hav...