US Patent Issued to Applied Materials on June 17 for "Plasma preclean system for cluster tool" (California, Nevada, Texas Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,318, issued on June 17, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Plasma preclean system for cluster tool" was invented by Songjae Lee (San Jose, Calif.), Masato Ishii (Sunnyvale, Calif.), Martin Truemper (Austin, Texas), Richard O. Collins (Santa Clara, Calif.), Martin Jeffrey Salinas (San Jose, Calif.), Yong Zheng (Dublin, Calif.), Anita Zhao (Sunnyvale, Calif.), Adele Mariadass (Reno, Nev.), Christophe Marcadal (Santa Clara, Calif.), Henry Barandica (San Jose, Calif.) and Ernesto J. Ulloa (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma processing system for cleaning a substrate is provided. The plasm...