US Patent Issued to Applied Materials on June 17 for "Cryogenic micro-zone electrostatic chuck connector assembly" (California Inventor)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,331,984, issued on June 17, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Cryogenic micro-zone electrostatic chuck connector assembly" was invented by Vijay D. Parkhe (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure generally relate to a cryogenic micro-zone connection assembly for a substrate support assembly suitable for use in cryogenic applications. In one or more embodiments, the cryogenic micro-zone connection assembly has a first end having a micro-zone connector. A second end has a socket connection. A flange is disposed between the micro-zone connector and the socket connect...