US Patent Issued to Applied Materials on June 17 for "Chamber body feedthrough for in chamber resistive heating element" (California Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,341, issued on June 17, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Chamber body feedthrough for in chamber resistive heating element" was invented by Brian Hayes Burrows (San Jose, Calif.), Ala Moradian (Sunnyvale, Calif.), Zuoming Zhu (Sunnyvale, Calif.) and Chia Cheng Chin (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method and apparatus for providing uniform heating of substrates disposed within a processing chamber is provided. The apparatus includes one or more heating coils disposed in the processing chamber. The one or more heating coils are electrically coupled to a power source using heater rods. The...