US Patent Issued to Applied Materials on June 10 for "Plasma generation quality monitoring using multi-channel sensor data" (California Inventors)

ALEXANDRIA, Va., June 18 -- United States Patent no. 12,327,714, issued on June 10, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Plasma generation quality monitoring using multi-channel sensor data" was invented by Jeremy Smith (San Mateo, Calif.), Tao Zhang (San Ramon, Calif.), Vivek Bharat Shah (Santa Clara, Calif.), John Poulose (San Jose, Calif.) and Ghadeh Hadi (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes obtaining, by a processing device, a measurement of a calibrated feedback control device of a process chamber. The method further includes determining, by the processing device, a first indication of performance of a plasma generating apparatus...