US Patent Issued to APPLIED MATERIALS on July 8 for "Process chamber process kit with protective coating" (California Inventors)

ALEXANDRIA, Va., July 9 -- United States Patent no. 12,354,843, issued on July 8, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Process chamber process kit with protective coating" was invented by Jian Wu (San Jose, Calif.), Wei Liu (San Jose, Calif.), Theresa Kramer Guarini (San Jose, Calif.), Linlin Wang (Fremont, Calif.), Malcolm Bevan (Santa Clara, Calif.) and Lara Hawrylchak (Gilroy, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments described herein generally relate to a method and apparatus for fabricating a chamber component for a plasma process chamber. In one embodiment a chamber component used within a plasma processing chamber is provided that includes a metallic b...