ALEXANDRIA, Va., July 9 -- United States Patent no. 12,351,917, issued on July 8, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Multi-zone heater tuning in substrate heater" was invented by Jun Ma (Milpitas, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system includes multi-zone heater with heating elements within a substrate support that correspond to multiple zones of the substrate support. A processing device coupled to the heating elements and to access a temperature matrix with multiple vectors corresponding to zones; determine a temperature map of the substrate support by multiplying the temperature matrix by a weight vector, the weight vector containing estimated weight val...