ALEXANDRIA, Va., July 30 -- United States Patent no. 12,374,521, issued on July 29, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Volume filling cassette for load lock" was invented by Michael Mason Carrell (Leander, Texas), Jason M. Schaller (Austin, Texas) and Victor Flores Iracheta (Prosper, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "An ion implantation system including an ion source for generating an ion beam, an end station containing a platen for supporting a substrate to be implanted by the ion beam, and a load lock disposed adjacent the end station and adapted to transfer substrates between an external environment and the end station. The load lock may include a transfer ch...