ALEXANDRIA, Va., July 30 -- United States Patent no. 12,371,776, issued on July 29, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Overlap susceptor and preheat ring" was invented by Zhepeng Cong (San Jose, Calif.), Schubert Chu (San Francisco), Nyi Oo Myo (San Jose, Calif.), Kartik Bhupendra Shah (Saratoga, Calif.), Zhiyuan Ye (San Jose, Calif.) and Richard O. Collins (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein generally provide improved control of gas flow in processing chambers. In at least one embodiment, a liner for a processing chamber includes an annular body having a sidewall and a vent formed in the annular body for exhausting gas ...