ALEXANDRIA, Va., July 23 -- United States Patent no. 12,366,853, issued on July 22, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Sensor metrology data integration" was invented by Sidharth Bhatia (Santa Cruz, Calif.), Garrett H. Sin (Sunnyvale, Calif.), Heng-Cheng Pai (Cupertino, Calif.), Pramod Nambiar (Santa Clara, Calif.), Ganesh Balasubramanian (Fremont, Calif.) and Irfan Jamil (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes identifying sets of sensor data associated with wafers processed via wafer processing equipment and identifying sets of metrology data associated with the wafers processed via the wafer processing equipment. The method further i...