ALEXANDRIA, Va., July 23 -- United States Patent no. 12,368,024, issued on July 22, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).
"Methods and apparatus for processing a substrate" was invented by Abdullah Zafar (Santa Clara, Calif.), William John Durand (Oakland, Calif.), Xinyuan Chong (Milpitas, Calif.), Kenric Choi (San Jose, Calif.), Weize Hu (Sunnyvale, Calif.), Kelvin Chan (San Ramon, Calif.), Amir Bayati (San Jose, Calif.), Michelle Sanpedro (Mountain View, Calif.), Philip A. Kraus (San Jose, Calif.) and Adolph Miller Allen (Oakland, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatus for processing a substrate are provided herein. For example, a gas supply conf...