US Patent Issued to Applied Materials on July 15 for "Semiconductor chamber components with advanced coating techniques" (California Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,150, issued on July 15, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Semiconductor chamber components with advanced coating techniques" was invented by Laksheswar Kalita (Milpitas, Calif.), Joseph Behnke (San Jose, Calif.), Ryan Pakulski (Brentwood, Calif.), Christopher L. Beaudry (San Jose, Calif.) and Jonathan Strahle (San Francisco).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present technology is generally directed to semiconductor processing systems and methods. Systems and methods include a chamber having a plurality of chamber components, such as a pedestal, a lid stack, a faceplate, electrode, and a showerhead. The fa...