ALEXANDRIA, Va., July 3 -- United States Patent no. 12,347,719, issued on July 1, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).
"Floating pin for substrate transfer" was invented by Sreenath Sovenahalli (Bangalore, India), Kirankumar Neelasandra Savandaiah (Bangalore, India), Bhaskar Prasad (Jamshedpur, India), Srinivasa Rao Yedla (Bangalore, India) and Thomas Brezoczky (Los Gatos, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A floating pin for positioning a substrate relative to a substrate support includes a shaft configured to move through a guide hole in a substrate support, and a pin head including a top surface and a flat shoulder surface disposed between the top surface and th...