US Patent Issued to Applied Materials on Jan. 28 for "Zone-controlled rare-earth oxide ALD and CVD coatings" (California Inventors)

ALEXANDRIA, Va., Jan. 29 -- United States Patent no. 12,209,307, issued on Jan. 28, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Zone-controlled rare-earth oxide ALD and CVD coatings" was invented by Xiaowei Wu (San Jose, Calif.), Jennifer Y. Sun (Mountain View, Calif.) and Michael R. Rice (Pleasanton, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein is a rare-earth oxide coating on a surface of an article with one or more interruption layers to control crystal growth and methods of its formation. The coating may be deposited by atomic layer deposition and/or by chemical vapor deposition. The rare-earth oxides in the coatings disclosed herein may have an atomic crystal...