US Patent Issued to APPLIED MATERIALS on Jan. 28 for "Lift pin mechanism" (California Inventors)

ALEXANDRIA, Va., Jan. 29 -- United States Patent no. 12,211,734, issued on Jan. 28, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Lift pin mechanism" was invented by Alexander Sulyman (San Francisco), Carlaton Wong (Sunnyvale, Calif.), Rajinder Dhindsa (Pleasanton, Calif.), Timothy Joseph Franklin (Campbell, Calif.), Steven Babayan (Los Altos, Calif.), Anwar Husain (Pleasonton, Calif.), James Hugh Rogers (Los Gatos, Calif.) and Xue Yang Chang (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatus for a lift pin mechanism for substrate processing chambers are provided herein. In some embodiments, the lift pin mechanism includes a lift pin comprising a shaft wit...