US Patent Issued to APPLIED MATERIALS on Jan. 27 for "Processing systems, chambers, and related methods including turbines for energy harnessing" (California Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,534,821, issued on Jan. 27, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Processing systems, chambers, and related methods including turbines for energy harnessing" was invented by Awse Ma'aya (Los Altos, Calif.) and Ala Moradian (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A processing system including a chamber that includes one or more sidewalls defining an internal volume, one or more heat sources configured to generate heat, a liner disposed in the internal volume and lining one or more sidewalls, and one or more cooling channels. The processing system includes a fluid system in fluid communication with the co...