ALEXANDRIA, Va., Jan. 28 -- United States Patent no. D1,110,289, issued on Jan. 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Process chamber collimator" was invented by Martin Lee Riker (Milpitas, Calif.), Madan Kumar Shimoga Mylarappa (Bangalore, India), Fuhong Zhang (San Jose, Calif.) and Xiangjin Xie (Fremont, Calif.).
The patent was filed on Oct. 18, 2024, under Application No. D/968,865.
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