US Patent Issued to Applied Materials on Jan. 27 for "Method of coating a chamber component" (Arizona, Nevada, California Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,534,798, issued on Jan. 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Method of coating a chamber component" was invented by Kirk Allen Fisher (Tempe, Ariz.), John Ford (Tempe, Ariz.), James M. Amos (Apache Junction, Ariz.), Hui Chen (Tempe, Ariz.), Shawn Joseph Bonham (Mesa, Ariz.), Xinning Luan (Tempe, Ariz.), Philip Michael Amos (Apache Junction, Ariz.), Aimee S. Erhardt (Tempe, Ariz.), Cathryne A. Ryan (Minden, Nev.) and Michael R. Riordan (Los Gatos, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include to a component support for use in coating chamber components via chemical vapor depositio...