US Patent Issued to Applied Materials on Jan. 27 for "Dose cup assembly for an ion implanter" (Massachusetts, Maine, New Hampshire Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,537,161, issued on Jan. 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Dose cup assembly for an ion implanter" was invented by Frank Sinclair (Hartland, Maine), Paul Joseph Murphy (Reading, Mass.), Bon-Woong Koo (Andover, Mass.), Gregory Edward Stratoti (Sandown, N.H.), Tseh-Jen Hsieh (Rowley, Mass.) and Glenn Green (Woburn, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A dose cup assembly that results in less particles in a process chamber is disclosed. The dose cup assembly includes a faceplate attached to a back wall of the process chamber, and having an opening; an aperture plate defining a plurality of slots; and a tunnel...