US Patent Issued to Applied Materials on Jan. 27 for "Adjustable exit angle source for ions and neutral particles" (Massachusetts Inventor)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,537,165, issued on Jan. 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Adjustable exit angle source for ions and neutral particles" was invented by Christopher A. Rowland (Rockport, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma source having an adjustable exit aperture is disclosed. The plasma source has a cylindrical body and two ends, wherein a housing aperture is formed along the cylindrical body. An adjustable output plate is disposed on the cylindrical body and covers the housing aperture. The adjustable output plate has an exit aperture, smaller than the housing aperture. The adjustable output plate is capable o...