US Patent Issued to Applied Materials on Jan. 13 for "Advanced barrier nickel oxide (BNiO) coating development for process chamber components via ozone treatment" (California Inventors)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,522,923, issued on Jan. 13, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Advanced barrier nickel oxide (BNiO) coating development for process chamber components via ozone treatment" was invented by Laksheswar Kalita (Santa Clara, Calif.), Joseph Behnke (Santa Clara, Calif.) and David Knapp (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Described herein is a chamber component including a metal layer comprising nickel and a barrier layer of nickel oxide over the metal layer. The barrier layer of nickel oxide may be formed by ozone treating the chamber component with air, nitrogen or argon O2, O3 at a temperature from...