US Patent Issued to Applied Materials on Feb. 4 for "MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing" (California Inventors)

ALEXANDRIA, Va., Feb. 5 -- United States Patent no. 12,216,015, issued on Feb. 4, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing" was invented by Chuang-Chia Lin (San Ramon, Calif.), David Peterson (San Jose, Calif.), Philip Allan Kraus (San Jose, Calif.) and Amir Bayati (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include diagnostic substrates and methods of using the diagnostic substrates to extract plasma parameters. In an embodiment, a diagnostic substrate comprises a substrate and an array of resonators across the substrate. In an embodiment, the array o...