US Patent Issued to Applied Materials on Feb. 3 for "Showerhead pumping geometry for precursor containment" (California Inventors)

ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,540,398, issued on Feb. 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Showerhead pumping geometry for precursor containment" was invented by Prahallad Iyengar (Santa Clara, Calif.), Sanjeev Baluja (Campbell, Calif.), Kartik Shah (Saratoga, Calif.), Chaowei Wang (San Diego), Janisht Golcha (San Francisco), Eric J. Hoffmann (San Francisco), Joseph AuBuchon (San Jose, Calif.), Ashutosh Agarwal (San Jose, Calif.), Lin Sun (Milpitas, Calif.) and Cong Trinh (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Gas injector with a vacuum channel having an inlet opening in the front face and an outlet opening in the back face of...