ALEXANDRIA, Va., Feb. 26 -- United States Patent no. 12,237,148, issued on Feb. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Plasma processing assembly using pulsed-voltage and radio-frequency power" was invented by Leonid Dorf (San Jose, Calif.), Rajinder Dhindsa (Pleasanton, Calif.), James Rogers (Los Gatos, Calif.), Daniel Sang Byun (Campbell, Calif.), Evgeny Kamenetskiy (Santa Clara, Calif.), Yue Guo (Redwood City, Calif.), Kartik Ramaswamy (San Jose, Calif.), Valentin N. Todorow (Palo Alto, Calif.), Olivier Luere (Sunnyvale, Calif.) and Linying Cui (Cupertino, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the disclosure provided herein include an apparatus an...