ALEXANDRIA, Va., Feb. 19 -- United States Patent no. 12,228,534, issued on Feb. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Capacitive sensor for monitoring gas concentration" was invented by Xiaopu Li (San Jose, Calif.), Kallol Bera (San Jose, Calif.), Yaoling Pan (San Jose, Calif.), Kelvin Chan (San Ramon, Calif.), Amir Bayati (San Jose, Calif.), Philip Allan Kraus (San Jose, Calif.), Kenric T. Choi (San Jose, Calif.) and William John Durand (San Francisco).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include gas concentration sensors, and methods of using such gas concentration sensors. In an embodiment, a gas concentration sensor comprises a first elec...