US Patent Issued to Applied Materials on Feb. 10 for "Passive lift pin assembly" (Indian, Singaporean, American Inventors)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,548,743, issued on Feb. 10, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Passive lift pin assembly" was invented by Thomas Brezoczky (Los Gatos, Calif.), Kirankumar Neelasandra Savandaiah (Bangalore, India), Srinivasan Manivannan (Tamilnadu, India) and Arun Rengaraj (Nexus @ One-North, Singapore).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate support assembly includes a substrate support that is moveable between a raised position, a lowered position below the raised position, and an intermediate position between the raised and lowered positions. A lift pin is disposed in a hole through the substrate support, and is movable v...